4000 SERIES
Smart 3D Coaxial Line Confocal Sensors
These sensors provide high-speed, high-resolution, versatile and shadow-free 3D inline inspection performance with outstanding angular range (Max Slope Angle up to +/- 85 degrees) for manufacturing applications in Semiconductor, Consumer Electronics, EV Battery, and many more.
- 1920 Points per Profile for High-resolution, Shadow-Free 3D Measurement and Inspection
- X Resolutions Up to 1.9 microns
- Fields of View Up to 5.0 millimeters
- Max Slope Angle Up to +/- 85 degrees
- Speeds Up to 16 kHz+ at Limited Measurement Range (With Gomax NX or PC Acceleration), 4+ kHz at Full Measurement Range
QUICK SPECS
| Model | G4010 | G4020 |
|---|---|---|
| Data Points / Profile | 1920 | 1920 |
| Scan Rate (Hz) * | 4300 - 14000 | 4500 - 16000 |
| Resolution X (µm) (Profile Data Interval) | 1.9 | 2.6 |
| Linearity Z (+/- % of MR) ** | 0.06 | 0.02 |
| Repeatability Z (µm) ** | 0.12 | 0.25 |
| Resolution Z (µm) | 0.25 | 0.50 |
| Clearance Distance (CD) (mm) | 9.3 +/-0.2 | 27.8 +/-0.3 |
| Measurement Range (mm) | 1.05 | 2.5 |
| Field of View (mm) | 3.5 | 5.0 |
| Max Slope Angle (º) | 45-85 | 30-85 |
| Dimensions (mm) | 183x82x459 | 183x82x428 |
| Weight (kg) | 10.4 | 9.6 |
Scanning Software: Browser-based GUI and open source SDK for configuration and real-time 3D visualization. Open source SDK, native drivers, and industrial protocols for integration with user applications, third-party image processing applications, robots, and PLCs.
* Speed ranges are from default configuration (full field of view and full measurement range) to high-speed configuration (reduced field-of-view and measurement range, uniform spacing disabled, optimized data spacing and output, acceleration enabled).
** These results are achieved with LMI standard target and optimized sensor configuration.
Factory Communication Protocols:
MECHANICALS
90 Degree Connector / Straight Connector
FactorySmart® Sensors
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